XRS-FP

XRF-FP is a quantitative analysis software package for X-Ray Fluoresence (XRF). XRF analysis with Fundamental Parameters (FP) converts elemental peak intensities to elemental concentrations or film thicknesses.

It processes the raw X-ray spectra measured using Amptek’s detectors and signal processors to obtain (1) the elemental peak intensities (i.e. the intensity of the peaks corresponding to each element) and then (2) the elemental concentrations or film thicknesses.